| 摘要 |
PURPOSE: A probe apparatus for a chip test and a method for testing a chip are provided to continually use data about an address execution result once addressing is performed for a wafer even though the wafer moves to another test site and takes a test. CONSTITUTION: A prober(1) for a chip test includes a first chuck(11), a second chuck(12), a first test unit(13), a second test unit(14), a wafer loading/unloading apparatus(17). The first test unit and the second test unit test a chip. The first chuck and the second chuck load a tested wafer. A loaded wafer is transferred to the first test unit or the second test unit. The wafer loading/unloading apparatus loads or unloads the wafer on the first chuck and the second chuck.
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