| 摘要 |
PURPOSE: A miniature electron beam apparatus is provided to efficiently perform a processing by revising a condenser lens in the vacuum condition of an electron beam emission chamber and controlling the position of a condenser lens group. CONSTITUTION: An electron beam emission chamber(100) forms an outer shape. An electron emitter(110) is placed on the top part of the electron beam emission chamber. A condenser lens group is formed in the electron beam emission chamber. An aligning part(125) controls the position of the condenser lens group while being included in the electron beam emission chamber. A main chamber is included in the lower part of the electron beam emission chamber. |
