| 摘要 |
PURPOSE: A probe pin with a nano coating film and a probe card using the same is provided to have a non stick property by coating a probe pin in the organic nanometer material of 1~40nm. CONSTITUTION: A probe card is electrically connected to the outside. A plurality of metal probe pins(11) is installed in the down direction of a substrate and is electrically connected between the substrate. A nano coating film(110) is formed in the surface of a probe main body. The nano coating film is composed of one organic material. The organic material includes a first moiety and a second moiety. The first moiety is chemically combined in the surface of the probe pin main body. The second moiety falls far from the surface of the metal probe pin. |
