发明名称 MAGNET UNIT AND SPUTTERING DEVICE INCLUDING THE SAME
摘要 The invention relates to a magnet unit and a spray plating device employing the same. The magnet unit comprises at least one central magnet and at least one periphery magnet around the periphery of the central magnet, one of the central magnet and the periphery magnet reciprocating along the length direction of the central magnet or along the a direction perpendicular to the length direction.
申请公布号 KR101156224(B1) 申请公布日期 2012.06.18
申请号 KR20090118820 申请日期 2009.12.03
申请人 发明人
分类号 C23C14/34;H01L21/203 主分类号 C23C14/34
代理机构 代理人
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