发明名称 JUDGING METHOD OF NEEDLE MARK AND COMPUTER READABLE RECORDING MEDIUM HAVING RECORDED PROGRAM FOR JUDGING NEEDLE MARK THEREON
摘要 Disclosed is a method to determine a needle mark, which can more accurately determine whether marks formed on electrode pads of devices are probe needle marks, thereby significantly reducing misdetermination of the marks as the probe needle marks. The method includes giving scores, which are used to determine the quality of marks as probe needle marks, to marks formed on a plurality of electrode pads of a plurality of devices, and selecting, based on the scores, an object device including an object electrode pad with an indefinite mark formed thereon, and selecting four comparison devices preceding the object device and nine time-successive comparison devices following the object device at successive times along the test direction, and determining if the indefinite mark of the object device is good or bad as a probe needle mark, by comparing a value of the score given to the indefinite mark of the object device plus scores given to marks formed on the comparison devices' comparison electrode pads corresponding to the object electrode pad, with a reference value.
申请公布号 KR101153653(B1) 申请公布日期 2012.06.18
申请号 KR20100021626 申请日期 2010.03.11
申请人 发明人
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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