VAPOR DELIVERY DEVICE, VAPORIZER, VAPORIZER UNIT AND METHOD FOR DELIVERING A VAPORIZED SOURCE MATERIAL

摘要

A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers (22) for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances (30) extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.