发明名称 Device for receiving and dispensing substrate e.g. glass substrate used in e.g. LCD device, has handling device that is secured with housing elements which are assembled into frame-less self-supporting housing by releasable fastener
摘要 <p>The device has housing (2) provided with input unit (3), through which substrates are passed into the housing. A handling device arranged between functional units is secured together with housing elements that are assembled into a frame-less self-supporting housing by releasable fastener. An independent claim is included for modular system for receiving and dispensing substrates.</p>
申请公布号 CH704193(A1) 申请公布日期 2012.06.15
申请号 CH20100002056 申请日期 2010.12.08
申请人 TEC-SEM AG 发明人 BRUNO INAUEN
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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