| 摘要 |
Disclosed is a method of manufacturing a gas sensor by using a nano-fiber including metal oxide. The method of manufacturing the gas sensor includes the steps of (1) mixing a polymer precursor with a solvent, (2) dispersing metal oxide into the mixture obtained through step (1), (3) preparing a nano-fiber by performing electro-spinning with respect to the mixture obtained through step (2), (4) oxidizing the nano-fiber obtained through step (3), (5) carbonizing the nano-fiber that has been oxidized through step (4), (6) activating the nano-fiber that has been carbonized through step (5), and (7) manufacturing the gas sensor by depositing the nano-fiber, which has been activated through step (6), between electrodes of a silicon wafer. The gas sensor is manufactured with superior sensitivity at a normal temperature and reliability. |
