发明名称 CLAMPOF PLASMA CLEANING DEVICE
摘要 PURPOSE: A clamp of a plasma cleaning apparatus is provided to prevent damage of a solder ball and burning damage by minimizing a space of a lower part and the solder ball of the lower surface of a printed circuit board. CONSTITUTION: A plurality of mounting grooves(111) is formed on the center region of the upper surface of a bottom plate. A guide groove(112) is respectively formed on both side regions of the upper surface of the bottom plate by being separated by the mounting grooves. A compression spring is vertically installed on the guide groove. A pressurizing unit(130) is combined in order to be penetrated by the compression spring on the guide groove. Both ends of a printed circuit board are clamped by the pressurizing unit. The printed circuit board is horizontally maintained by pressing the upper part of the pressurizing unit.
申请公布号 KR20120062985(A) 申请公布日期 2012.06.15
申请号 KR20100123950 申请日期 2010.12.07
申请人 AMKOR TECHNOLOGY KOREA, INC. 发明人 KIM, KWANG HO;KIM, JIN SEONG;PARK, DONG JOO
分类号 H01L21/50;H01L21/3065;H01L21/687 主分类号 H01L21/50
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