METHOD OF IONIZATION

摘要

A plasma (106) is formed from one or more gases in a plasma chamber (102) using at least power (203) and a second power (204). A first ion species (107) is generated at said first power and. a second ion species (108) is generated at said second power. In one embodiment, the first ion species and second ion species are implanted into a workpiece (105) at two different energies using a least a first bias voltage (205) and a second bias voltage (206). This may enable implantation to two different depths. These ion species may be atomic o molecular, ions. The molecular ions may be larger than the gases used to form the plasma.