| 摘要 |
<p>PURPOSE: A transfer apparatus using magnetic force is provided to minimize errors of automatic control due to the lapse of time, and to prevent the deformation of a ball screw shaft due to load. CONSTITUTION: A transfer apparatus using magnetic force(100) comprises a body(110), a ball screw(130), a first slide unit, and a second slide unit(140). The body comprises an upper vacuum part which is spatially blocked by a sealing guide part and a lower opening part. The ball screw is installed in the lower opening part of the body. The first slide unit is installed in the ball screw to reciprocate according to the rotation of the ball screw. A first magnetic body is installed inside the first slide unit. The second slide unit is slidingly installed in the upper vacuum part of the body, and a second magnetic body is installed inside the second slide unit. The second slide unit slidingly moves according to the movement of the first slide unit.</p> |
