发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SAME
摘要 A semiconductor device includes an MIS transistor and an electric fuse. The MIS transistor includes a gate insulating film formed on the semiconductor substrate, and a gate electrode including a first polysilicon layer, a first silicide layer, and a first metal containing layer made of a metal or a conductive metallic compound. The electric fuse includes an insulating film formed on the semiconductor substrate, a second polysilicon layer formed over the insulating film, and a second silicide layer formed on the second polysilicon layer.
申请公布号 US2012146156(A1) 申请公布日期 2012.06.14
申请号 US201213396892 申请日期 2012.02.15
申请人 SHIRAHAMA MASANORI;AGATA YASUHIRO;KAWASAKI TOSHIAKI;HIROFUJI YUICHI;YAMADA TAKAYUKI;PANASONIC CORPORATION 发明人 SHIRAHAMA MASANORI;AGATA YASUHIRO;KAWASAKI TOSHIAKI;HIROFUJI YUICHI;YAMADA TAKAYUKI
分类号 H01L27/06;H01L21/8234 主分类号 H01L27/06
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