发明名称 |
EXTENDING LIFETIME OF YTTRIUM OXIDE AS A PLASMA CHAMBER MATERIAL |
摘要 |
A method of installing a component of a plasma processing chamber by replacing a used component with a component made by forming a dual-layer green body and co-sintering the dual-layer green body so as to form a three-layer component. The three layer component comprises an outer layer of yttria, an intermediate layer of YAG, and a second outer layer of alumina. The component is installed such that the outer layer of yttria is exposed to the plasma environment when the chamber is in operation. |
申请公布号 |
US2012144640(A1) |
申请公布日期 |
2012.06.14 |
申请号 |
US201113324287 |
申请日期 |
2011.12.13 |
申请人 |
SHIH HONG;OUTKA DUANE;LIU SHENJIAN;DAUGHERTY JOHN;LAM RESEARCH CORPORATION |
发明人 |
SHIH HONG;OUTKA DUANE;LIU SHENJIAN;DAUGHERTY JOHN |
分类号 |
B23P6/00 |
主分类号 |
B23P6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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