发明名称 |
SYSTEM OF CONTROLLING DIAMETER OF SINGLE CRYSTAL INGOT AND SINGLE CRYSTAL INGOT GROWING APPARATUS INCLUDING THE SAME |
摘要 |
Provides are a system of controlling a diameter of a single crystal ingot and a single crystal ingot growing apparatus including the same. The system of controlling a diameter of a single crystal ingot includes: a diameter measuring sensor measuring a diameter of a single crystal ingot; a Low-Pass Filter (LPF) removing short period noise from measured data from the diameter measuring sensor; and an Automatic Diameter Control (ADC) sensor controlling the diameter of the single crystal ingot through controlling of a pull speed by using data having the noise removed as current data. |
申请公布号 |
US2012145071(A1) |
申请公布日期 |
2012.06.14 |
申请号 |
US201113306973 |
申请日期 |
2011.11.29 |
申请人 |
HONG YOUNG-HO;HA SE-GEUN;JUNG YO-HAN |
发明人 |
HONG YOUNG-HO;HA SE-GEUN;JUNG YO-HAN |
分类号 |
C30B15/22;G06F17/10 |
主分类号 |
C30B15/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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