METHOD FOR MANUFACTURING GROUP III NITRIDE CRYSTAL, METHOD FOR MANUFACTURING GROUP III NITRIDE TEMPLATE, THE GROUP III NITRIDE CRYSTAL, AND THE GROUP III NITRIDE TEMPLATE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a group III nitride crystal, a method for manufacturing a group III nitride template, and the group III nitride crystal and the group III nitride template, which can suppress damage in a reactor made of quartz.

SOLUTION: The group III nitride crystal contains carbon in an amount of ≥1×1016and <1×1020cm-3therein, wherein the carbon replaces group V site, and does not contain other impurities acting as an acceptor in the group III nitride crystal.

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