发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 Disclosed are a semiconductor device and a method of manufacturing the same. In the semiconductor device according to an exemplary embodiment of the present disclosure, at the time of forming a source electrode, a drain electrode, a field plate electrode, and a gate electrode on a substrate having a heterojunction structure such as AlGaN/GaN, the field plate electrode made of the same metal as the gate electrode is formed on the side surface of a second support part positioned below a head part of the gate electrode so as to prevent the gate electrode from collapsing and improve high-frequency and high-voltage characteristic of the semiconductor device.
申请公布号 US2012146107(A1) 申请公布日期 2012.06.14
申请号 US201113274367 申请日期 2011.10.17
申请人 LIM JONG-WON;AHN HOKYUN;KANG DONG MIN;CHANG WOOJIN;KIM HAE CHEON;NAM EUN SOO;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 LIM JONG-WON;AHN HOKYUN;KANG DONG MIN;CHANG WOOJIN;KIM HAE CHEON;NAM EUN SOO
分类号 H01L29/772;H01L21/28 主分类号 H01L29/772
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