发明名称 |
THIN FILM TRANSISTOR (TFT) HAVING COPPER ELECTRODES |
摘要 |
A TFT structure is provided in which an oxidic semiconductor is used in combination with an electrode material based on a Cu alloy. |
申请公布号 |
US2012146018(A1) |
申请公布日期 |
2012.06.14 |
申请号 |
US201013390388 |
申请日期 |
2010.08.25 |
申请人 |
SCHNEIDER-BETZ SABINE;SCHLOTT MARTIN;HERAEUS MATERIALS TECHNOLOGY GMBH & CO. KG |
发明人 |
SCHNEIDER-BETZ SABINE;SCHLOTT MARTIN |
分类号 |
H01L29/786 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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