| 发明名称 |
SILICON STRUCTURE, ARRAY SUBSTRATE USING SAME, AND METHOD FOR PRODUCING SILICON STRUCTURE |
| 摘要 |
<p>This silicon structure has: a substrate; a first layer formed on the surface of the substrate; and a fibrous film-shaped material formed on the surface of the first layer. The first layer and the film-shaped material are a silicon compound configured from the same element, and the first layer and the film-shaped material are directly bonded.</p> |
| 申请公布号 |
WO2012077325(A1) |
申请公布日期 |
2012.06.14 |
| 申请号 |
WO2011JP06785 |
申请日期 |
2011.12.05 |
| 申请人 |
PANASONIC CORPORATION;YAMAMOTO, TAKEKI;NAKATANI, MASAYA;TAKAHASHI, MAKOTO |
发明人 |
YAMAMOTO, TAKEKI;NAKATANI, MASAYA;TAKAHASHI, MAKOTO |
| 分类号 |
G01N35/02;B81B1/00;B81C1/00;G01N33/53;G01N33/543;G01N33/552;G01N37/00 |
主分类号 |
G01N35/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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