| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing method for an adhered material for easily dividing, in a sealed manner, the inside of a hollow structure in which at least three lifting spaces are set in parallel from side to side in a horizontal direction, and processing the adhered material, etc. <P>SOLUTION: The processing method for adhered material for processing an adhered material in the inside of the hollow structure having an internal space in which at least three lifting spaces for moving an object up and down are set in parallel from side to side in a horizontal direction has the dividing step for forming a partition to divide, in a sealed manner, the inside of the hollow structure into the preceding working space where the adhered material is processed precedingly and the succeeding working space where the adhered material is processed succeedingly in the intermediate lifting space other than the lifting spaces located at both ends, and the adhered material processing step for putting the succeeding working space into a state in which the object can move up and down, and performing the processing in the preceding processing space. <P>COPYRIGHT: (C)2012,JPO&INPIT |
