| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for inspecting probe card capable of shortening an inspection time; and to provide an inspection board used therefor. <P>SOLUTION: This method for inspecting a probe card 100 includes: common electrodes 120A and 120B; probes 130A-A4 electrically connected to the common electrode 120A; and a plurality of probes 130B-B4 electrically connected to the common electrode 120B. In this method, while power is fed to the common electrodes 120A and 120B, the probes 130A1-A4 are brought one by one into contact with inspection electrodes 220A1-A4, respectively, and substantially simultaneously, the probes 130B1-B4 are brought one by one into contact with inspection electrodes 220B1-B4, respectively. <P>COPYRIGHT: (C)2012,JPO&INPIT |
