| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for fabricating a vertical light-emitting device with an improved device yield and light extraction efficiency, and a substrate module for the vertical light-emitting device. <P>SOLUTION: In a method for fabricating a vertical light emitting device, separation or lift-off of a substrate 10 from a light emitting diode structure formed on the substrate 10 is facilitated by forming voids 13' at the interface between the substrate 10 and the light emitting diode structure where the separation or lift-off occurs. A substrate module contains the substrate 10 and an epitaxial layer 20, and the voids 13' are formed at the interface between the substrate 10 and the epitaxial layer 20 in a controllable manner. The light emitting diode structure is then formed on the epitaxial layer 20, followed by attaching the light emitting diode structure to a superstrate 70, separating the substrate 10 from the epitaxial layer 20, and forming a conductive layer and a contact electrode at the location of the substrate 10, so as to form a vertical light emitting device. <P>COPYRIGHT: (C)2012,JPO&INPIT |
