发明名称 PHASE CHANGE MEMORY DEVICE HAVING BURIED CONDUCTION LINES DIRECTLY UNDERNEATH PHASE CHANGE MEMORY CELLS AND FABRICATION METHOD THEREOF
摘要 A phase change memory device having buried conduction lines directly underneath phase change memory cells is presented. The phase change memory device includes buried conduction lines buried in a semiconductor substrate and phase change memory cells arranged on top of the buried conductive lines. By having the buried conduction lines directly underneath the phase change memory cells, the resultant device can realize a considerable reduction in size.
申请公布号 US2012149167(A1) 申请公布日期 2012.06.14
申请号 US201213402164 申请日期 2012.02.22
申请人 YANG KI HO;HYNIX SEMICONDUCTOR INC. 发明人 YANG KI HO
分类号 H01L21/02 主分类号 H01L21/02
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