发明名称 DISPLAY DEVICE MANUFACTURING APPARATUS, DISPLAY DEVICE MANUFACTURING METHOD, AND DISPLAY DEVICE
摘要 <p>Disclosed is a display device manufacturing apparatus capable of exposing to the atmosphere and temporarily storing a temporarily sealed body of a display device, capable of obtaining display device final products with various film structures depending on performance demands, and having a good throughput; also disclosed are a display device manufacturing method and a display device. A first sealing film is formed on the surface of organic EL elements by means of a first sealing film forming device (27) to obtain temporarily sealed bodies. Said temporarily sealed bodies are extracted by an LL (28) from a reduced-pressure space to a temporarily sealed body storage unit (29) in a space at atmospheric pressure. After temporarily storing the temporarily sealed bodies in the temporarily sealed body storage unit (29) in a state in which resistance to moisture transmission is ensured by the first sealing film, said temporary sealed bodies are conveyed by a conveying device with appropriate timing to SiN film forming devices (30) of second sealing film forming units (6) where a second sealing film is formed on the temporarily sealed bodies.</p>
申请公布号 WO2012077659(A1) 申请公布日期 2012.06.14
申请号 WO2011JP78133 申请日期 2011.12.06
申请人 TOKYO ELECTRON LIMITED;ISHIKAWA, HIRAKU;HAYASHI, TERUYUKI 发明人 ISHIKAWA, HIRAKU;HAYASHI, TERUYUKI
分类号 H05B33/10;G09F9/30;H01L27/32;H01L51/50;H05B33/04 主分类号 H05B33/10
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