发明名称 |
DISPLAY DEVICE MANUFACTURING APPARATUS, DISPLAY DEVICE MANUFACTURING METHOD, AND DISPLAY DEVICE |
摘要 |
<p>Disclosed is a display device manufacturing apparatus capable of exposing to the atmosphere and temporarily storing a temporarily sealed body of a display device, capable of obtaining display device final products with various film structures depending on performance demands, and having a good throughput; also disclosed are a display device manufacturing method and a display device. A first sealing film is formed on the surface of organic EL elements by means of a first sealing film forming device (27) to obtain temporarily sealed bodies. Said temporarily sealed bodies are extracted by an LL (28) from a reduced-pressure space to a temporarily sealed body storage unit (29) in a space at atmospheric pressure. After temporarily storing the temporarily sealed bodies in the temporarily sealed body storage unit (29) in a state in which resistance to moisture transmission is ensured by the first sealing film, said temporary sealed bodies are conveyed by a conveying device with appropriate timing to SiN film forming devices (30) of second sealing film forming units (6) where a second sealing film is formed on the temporarily sealed bodies.</p> |
申请公布号 |
WO2012077659(A1) |
申请公布日期 |
2012.06.14 |
申请号 |
WO2011JP78133 |
申请日期 |
2011.12.06 |
申请人 |
TOKYO ELECTRON LIMITED;ISHIKAWA, HIRAKU;HAYASHI, TERUYUKI |
发明人 |
ISHIKAWA, HIRAKU;HAYASHI, TERUYUKI |
分类号 |
H05B33/10;G09F9/30;H01L27/32;H01L51/50;H05B33/04 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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