| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device for an exposure device and an exposure device which can shorten a time for replacing a light source portion and a downtime of a device. <P>SOLUTION: In the light irradiation device 80 which includes a plurality of light source portions 73 each of which includes a lamp 71 and a reflecting mirror 72 that causes the light emitted from the lamp 71 to be emitted directionally, a plurality of cassettes 81 each of which can be equipped with the predetermined number of light source portions 73, and a support medium 82 which can be equipped with the plurality of cassettes 81, a lamp pressing cover 84 of the cassettes 81 has a support member 86 for supporting a plurality of lamps 73 so that a light of the plurality of lamps 73 is incident on an incident surface of an integrator lens 74 when being equipped with the plurality of light source portions 73. <P>COPYRIGHT: (C)2012,JPO&INPIT |
