发明名称 METHOD FOR PRODUCING MESOPOROUS FILM AND MESOPOROUS FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for producing a mesoporous film reducible of the shrinkage of a mesostructured film that is caused by the removal of a template. <P>SOLUTION: The method for producing the mesoporous film includes: a step (1000) of preparing the mesostructured film containing a surfactant and an inorganic oxide; a step (1010) of holding the mesostructured film in an atmosphere containing a compound having formula (1); and a step (1020) of removing the surfactant from the mesostructured film during and/or subsequently to the holding step. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012111651(A) 申请公布日期 2012.06.14
申请号 JP20100260529 申请日期 2010.11.22
申请人 CANON INC 发明人 KUBO WATARU
分类号 C01B37/00 主分类号 C01B37/00
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