发明名称 |
3-D NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A three-dimensional (3-D) non-volatile memory device includes a plurality of word line structures extended in parallel and including a plurality of interlayer dielectric layers and a plurality of word lines that are alternately stacked over a substrate, a plurality of channels protruding from the substrate configured to penetrate the plurality of interlayer dielectric layers and the plurality of word lines, and an air gap formed between the plurality of word line structures.
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申请公布号 |
US2012146122(A1) |
申请公布日期 |
2012.06.14 |
申请号 |
US201113315147 |
申请日期 |
2011.12.08 |
申请人 |
WHANG SUNG JIN;LEE KI HONG |
发明人 |
WHANG SUNG JIN;LEE KI HONG |
分类号 |
H01L29/788;H01L21/336;H01L29/792 |
主分类号 |
H01L29/788 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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