| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the detection accuracy of acceleration and an angular velocity without increasing a circuit area. <P>SOLUTION: In a first detection state, the fixed electrodes of detection capacities Cd1 and Cd3 are commonly connected, and then connected to the inversion input terminal of an operation amplifier OP1. The fixed electrodes of detection capacities Cd2 and Cd4 are commonly connected, and then connected to the noninversion input terminal of the operation amplifier OP1, and integration capacities Ci1 and Ci3 function as feedback capacities. In a second detection state, the fixed electrodes of the detection capacities Cd1 and Cd4 are commonly connected, and then connected to the inversion input terminal of the operation amplifier OP1. The fixed electrodes of detection capacities Cd2 and Cdd are commonly connected, and then connected to the noninversion input terminal of the operation amplifier OP1, and integration capacities Ci2 and Ci4 function as feedback capacities. A detection unit 14 detects acceleration based on the output signal of a charge amplifier 13 in the first detection state, and detects an angular velocity based on the output signal of the charge amplifier 13 in the second detection state. <P>COPYRIGHT: (C)2012,JPO&INPIT |
