| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning device that reduces deflection of an upper slider and eliminates moving error of a stage along the upper slider when two sliders crossing orthogonally in two directions are vertically placed and a tension member is provided between a lower slider and a stage. <P>SOLUTION: The attachment position in Z-axis direction of tension members 61A and 61B provided between a first (lower) slider 12 and a stage 30, namely, the supporting height of the stage 30 by the tension members 61A and 61B is made adjustable, thereby adjusting the load distribution of the stage 30 to a second (upper) slider 13. When the stage 30 is heavier (mass is larger), the attachment position (height) of the tension members 61A and 61B is made high in vertical direction, so as to reduce the load distribution of the stage 30 to the second slider 13. Therefore, the deflection generating in the second slider 13 can be reduced. <P>COPYRIGHT: (C)2012,JPO&INPIT |
