| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact and inexpensive spectral device capable of rapidly dispersing light on a two-dimensional (XY) surface with high wavelength resolution, with a comparatively small number of components, and to provide a microscope using the spectral device. <P>SOLUTION: The spectral device comprises: a light source for irradiating a sample; a variable bandpass filter for selecting a desired wavelength region from reflected light of the sample; a two-dimensional array detector on which transmitted light of the variable bandpass filter is incident; and a control unit which shifts the wavelength region of the variable bandpass filter, and calculates difference of detection output of each element of the two-dimensional array detector between before and after the shift, to obtain spectral output which is the difference. A microscope using the spectral device is also provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
