| 发明名称 |
TIO2-CONTAINING SILICA GLASS, AND OPTICAL MEMBER FOR EUV LITHOGRAPHY |
| 摘要 |
The present invention relates to a TiO2-containing silica glass having a TiO2 content of 7.5 to 12% by mass, a fictive temperature of 1,000° C. or higher, and a temperature at which a coefficient of linear thermal expansion is 0 ppb/° C. being within the range of 40 to 110° C. |
| 申请公布号 |
US2012149543(A1) |
申请公布日期 |
2012.06.14 |
| 申请号 |
US201213401475 |
申请日期 |
2012.02.21 |
| 申请人 |
KOIKE AKIO;IWAHASHI YASUTOMI;KIKUGAWA SHINYA;ASAHI GLASS COMPANY, LIMITED |
发明人 |
KOIKE AKIO;IWAHASHI YASUTOMI;KIKUGAWA SHINYA |
| 分类号 |
C03C3/06;C03C3/076 |
主分类号 |
C03C3/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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