| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor element in which damage of a piezoelectric body to external vibration is hard to occur and which is excellent in durability. <P>SOLUTION: The pressure sensor element is formed by laminating a plate-like electrode 2 and a piezoelectric film 3, and at least one electrode is an electrode 21 having a shape different from that of the other electrode 22. As a result, an oscillatory wave is irregularly reflected and resonance due to the external vibration is suppressed, thereby capable of preventing the piezoelectric film from being damaged due to resonance. <P>COPYRIGHT: (C)2012,JPO&INPIT |
