| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently and easily form a polygeneric thin film without enlarging a vacuum tank used for film forming, in a film forming method and a film forming device. <P>SOLUTION: In the film forming which forms the polygeneric thin film on an object 3 to be treated in the vacuum tank 2, a target assembly 6 having two or more kinds of target pieces different in constitution element or in composition is placed on a packing plate 7 which is electrically connected to negative electrodes of a plurality of independently output-adjustable power sources 10a, 10b, 10c and 10d, in order to apply voltages to the respective two or more kinds of target pieces, there are arranged electrodes which are electrically connected to positive electrodes of the power sources 10a, 10b, 10c and 10d via individual wiring, output voltages of the power sources 10a, 10b, 10c and 10d are individual adjusted to ranges of 0% to 100%, respectively, and discharge amounts of atoms or molecules from the target pieces are changed, thus forming the polygeneric thin film on the object to be treated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
