| 发明名称 |
ORGANIC LAYER DEPOSITION APPARATUS |
| 摘要 |
An organic layer deposition apparatus for forming an organic layer while a substrate is being moved, in which an interval between the substrate and the organic layer deposition apparatus can be measured at a vacuum condition.
|
| 申请公布号 |
US2012145077(A1) |
申请公布日期 |
2012.06.14 |
| 申请号 |
US201113198591 |
申请日期 |
2011.08.04 |
| 申请人 |
CHANG UNO;RYU JAE-KWANG;CHOI EUN-SUN;KIM BYUNG-SU |
发明人 |
CHANG UNO;RYU JAE-KWANG;CHOI EUN-SUN;KIM BYUNG-SU |
| 分类号 |
B05C11/00;B05B1/00 |
主分类号 |
B05C11/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
