| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conductive membrane substrate which can enhance photoelectric conversion efficiency by reducing absorption of light ray in a transparent conductive membrane, and to provide a method of manufacturing the same, and a solar cell using the substrate. <P>SOLUTION: In a transparent conductive membrane substrate for a photoelectric conversion device, a first oxide structure layer 12, a second oxide layer 14 and a conductive oxide layer 16 are formed, in this order, on a glass substrate 18. A plurality of protrusions protruding from the surface of the glass substrate 18 are provided on the first oxide structure layer 12, and the height of the protrusions from the surface of the glass substrate 18 is 200-2000 nm. The second oxide layer 14 is composed of a mixed oxide of Si and Sn, and the mole ratio (Sn/(Si+Sn)) of Sn to the total of Si and Sn is 0.05-0.3. The second oxide layer 14 has a thickness of 2-10 nm, and the conductive oxide layer 16 is composed of SnO<SB POS="POST">2</SB>containing F. <P>COPYRIGHT: (C)2012,JPO&INPIT |
