| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a differential pressure detection device capable of accurately detecting a fine differential pressure regardless of an initial pressure of a detection object. <P>SOLUTION: The differential pressure detection device comprises: a high pressure detection chamber 36 connected to a high pressure fluctuation object; a low pressure detection chamber 37 connected to a low pressure fluctuation object; and a pressure amplification mechanism which is adjacent to the high pressure detection chamber 36 and the low pressure detection chamber 37 and includes a flapper 2 and a nozzle 10. In the differential pressure detection device, the pressure amplification mechanism includes a fluid supply path 12 for supplying fluid to the nozzle 10 and a discharge path 15 for discharging fluid passing through the nozzle 10, and a differential pressure between the high pressure detection chamber 36 and the low pressure detection chamber 37 is detected based on the pressure amplified in the pressure amplification mechanism. The differential pressure detection device further includes: a reference pressure chamber 20 sectioned from the pressure amplification mechanism; a communication passage 24 communicating the reference pressure chamber 20 with the low pressure detection chamber 37; and differential pressure detection means 4, 13, and 14 detecting a differential pressure between the pressure amplified by the pressure amplification mechanism and the pressure in the reference pressure chamber 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
