METHOD FOR MEASURING AN OPTICAL SYSTEM

摘要

The invention relates to a method for measuring an optical system at the location of a measurement plane (409). The method comprises the following steps: - a first plurality of test beams (464a, 464b, 464c, 464d) of a radiation pass through the optical system and impinge on an identical first measurement region (461) in a measurement plane (409), wherein the test beams of the first plurality of test beams (464a, 464b, 464c, 464d) pass through the optical system on optical paths that differ in pairs and impinge on the first measurement region (461) at angles of incidence that differ in pairs with respect to the measurement plane (409), - a second plurality of test beams (465a, 465b, 465c, 465d) of a radiation pass through the optical system and impinge on an identical second measurement region (462) in the measurement plane (409), wherein the test beams of the second plurality of test beams (465a, 465b, 465c, 465d) pass through the optical system on optical paths that differ in pairs and impinge on the second measurement region (462) at angles of incidence that differ in pairs with respect to the measurement plane (409), wherein the second measurement region (462) differs from the first measurement region (461), - by means of a measuring device (469, 470), at least one associated measurement value of a first measurement variable of the test beam at the location of the first measurement region is detected for each test beam of the first plurality of test beams, - by means of a measuring device, at least one associated measurement value of a second measurement variable of the test beam at the location of the second measurement region is detected for each test beam of the second plurality of test beams, - an associated impingement region (467a, 467d, 468a, 468d) on at least one reference surface (466, 471) of the optical system is calculated or is determined with the aid of a database for each test beam of the first plurality of test beams (464a, 464b, 464c, 464d) and of the second plurality of test beams (465a, 465b, 465c, 465d), wherein the impingement region associated with a test beam is defined as the surface region of the at least one reference surface (466, 471) on which radiation of the respective test beam impinges, - a spatial diagnosis distribution of at least one property of the at least one reference surface is calculated from the measurement values and the impingement regions for each test beam.