发明名称 EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an exposure device in which speckles of an optical image formed on a photosensitive medium can be made obscure, and occurrence of unevenness of brightness can be minimized effectively in an illuminated region. <P>SOLUTION: An exposure device 10 comprises an optical element 50, an irradiation device 60, and a spatial light modulator 30. A hologram recording medium 55 is scanned with coherent light by using a scanning device 65, and coherent light irradiated from the hologram recording medium 55 impinges on the spatial light modulator 30 which overlaps an illuminated region LZ. Since a photosensitive medium 15 is arranged closely to the spatial light modulator 30, the coherent light can be guided onto the photosensitive medium 15 with an extremely simple configuration without highlighting the speckles. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012114358(A) 申请公布日期 2012.06.14
申请号 JP20100263906 申请日期 2010.11.26
申请人 DAINIPPON PRINTING CO LTD 发明人 ISHIDA KAZUTOSHI;KURASHIGE MAKIO;TAKANOKURA TOMOE;OYAGI YASUYUKI
分类号 H01L21/027;G02B19/00;G02B26/10 主分类号 H01L21/027
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