| 摘要 |
<P>PROBLEM TO BE SOLVED: To remarkably shorten the processing time of the step of adsorbing a dye by a porous semiconductor layer formed on a substrate surface to be processed. <P>SOLUTION: The dye absorption unit 20 has a processing tank 30 with an upper face opening for collectively performing a dye absorption process on a batch of substrates G, and as movable system parts in connection with the processing tank 30, a boat 32 which can be put in and taken out of the processing tank 30 through the upper face opening, a boat transporting part 34 for putting the boat 32 in the processing tank 30 and taking it from there, and a top cover 36 for detachably closing the upper face opening of the processing tank 30. The dye absorption unit 20 further includes a dye solution supplying part for supplying a dye solution into the processing tank 30, and a flow control part for controlling the flow of the dye solution in the processing tank during the time of processing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
