| 发明名称 |
METHODS AND APPARATUS FOR THE PRODUCTION OF HIGH PURITY SILICON |
| 摘要 |
Methods and apparatus for the production of high purity silicon including a silicon deposition reactor with a gas distribution plate for injecting gas into the silicon deposition reactor.
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| 申请公布号 |
US2012148728(A1) |
申请公布日期 |
2012.06.14 |
| 申请号 |
US20100964331 |
申请日期 |
2010.12.09 |
| 申请人 |
CANLE MANUEL VINCENTE VALES;MARTINEZ MARIA TOMAS;SANCHEZ JAVIER SAN-SEGUNDO;SILIKEN SA |
发明人 |
CANLE MANUEL VINCENTE VALES;MARTINEZ MARIA TOMAS;SANCHEZ JAVIER SAN-SEGUNDO |
| 分类号 |
C23C16/24;C23C16/442;C23C16/455;C23C16/52 |
主分类号 |
C23C16/24 |
| 代理机构 |
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代理人 |
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