| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface shape measuring method that facilitates, when measuring a measurement area greater than the field of view of a surface shape measuring device, linking of a plurality of measured results together, reduces overlapping areas to shorten the overall time taken for measurement and furthermore reduces the occurrence of a certain cumulative error. <P>SOLUTION: When surface measurement data are to be linked together, the rotational direction is not corrected, but the surface measurement data are only shifted in parallel and synthesized to acquire synthesized surface measurement data. <P>COPYRIGHT: (C)2012,JPO&INPIT |
