| 发明名称 |
SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING THIN LAYER USING THE SAME |
| 摘要 |
A substrate support unit includes a support member configured to accommodate a plurality of substrate holders and a driving member configured to rotate the substrate holders and the support member on their respective axes. |
| 申请公布号 |
US2012145080(A1) |
申请公布日期 |
2012.06.14 |
| 申请号 |
US201113323214 |
申请日期 |
2011.12.12 |
| 申请人 |
PARK YOUNGKYOU;SUH JEONGSOO;HWANG WANGOO;CHOI HOONSANG;PARK JONGROK |
发明人 |
PARK YOUNGKYOU;SUH JEONGSOO;HWANG WANGOO;CHOI HOONSANG;PARK JONGROK |
| 分类号 |
C23C16/458;B23Q1/64;C23C16/455;C23C16/46 |
主分类号 |
C23C16/458 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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