LOAD LOCK DEVICE

摘要

Provided is a load lock device comprising: a container (31) disposed to be capable of pressure variations between pressure corresponding to a vacuum chamber and atmospheric pressure; a purge gas supply source (48) which supplies purge gas within the container (31); an evacuation mechanism (44) which evacuates the interior of the container (31); a pressure adjustment mechanism (49) which adjusts the pressure within the container (31) to the pressure corresponding to the vacuum chamber and the atmospheric pressure; a cooling member (32) which is disposed within the container (31) and which cools a substrate which is positioned in proximity thereto; a first purge gas discharge member (61) which supplies the purge gas parallel to the substrate in a turbulence-controlled state; and second purge gas discharge members (65) formed from a porous material which discharge the purge gas from below the substrate toward the lower face of the substrate.