| 摘要 |
PURPOSE: A non-contact type washing apparatus for a modified nozzle device, a washing system using the same, and a washing method using the same are provided to prevent the supply of thinner from being stopped by previously eliminating bubbles in case of supplying the thinner. CONSTITUTION: A non-contact type washing apparatus for a modified nozzle device includes a washing head(250), thinner supplying holes(244a, 244b), air supplying holes(246a, 246b), a thinner supplying conduit(252), an air supplying conduit(254), a thinner supplying unit(260), a thinner buffer tank(262), a bubble discharging unit(268), a pressurizing regulator(264), and an air supplying unit(270). The washing head includes a washing block(240). The thinner buffer tank temporarily stores thinner from the thinner supplying unit. The bubble discharging unit discharges a non-contact type washing unit(230) if the thinner is supplied from the thinner supplying unit to the thinner buffer tank. The pressurizing regulator adjusts the amount of thinner supplied from the thinner buffer tank to the washing head.
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