摘要 |
<P>PROBLEM TO BE SOLVED: To provide improved back side contact solar cell structures and fabrication processes. <P>SOLUTION: Active diffusion junctions (211, 212, 213, and 214) of a solar cell are formed by diffusing dopants from dopant sources (201, 202, 203, and 204) selectively deposited on the back side of a wafer 100. The dopant sources (201, 202, 203, and 204) may be selectively deposited using a printing method, for example. Multiple dopant sources may be employed to form active diffusion regions of varying doping levels. The front side 103-1 of the wafer may be textured prior to forming the dopant sources (201, 202, 203, and 204) using a texturing process that minimizes removal of wafer materials. Openings to connect metal gridlines with the active diffusion junctions may be formed using a self-aligned contact opening etching process. <P>COPYRIGHT: (C)2012,JPO&INPIT |