发明名称 Seal and Fixation Assembly for a Rotating Cylindrical Magnetron Electrode
摘要 A seal and fixation assembly includes a cylindrical target having an inside surface with a shoulder that forms a stop within the target. A target retaining ring is disposed about the target. A seal plate is disposed within the target and engages the stop and the inside surface of the target. An end cap is disposed on the end of the target and includes a portion with a beveled surface within the target. A sealing element is disposed between the inside surface of the target, the seal plate, and the beveled surface of the end cap. A clamp is disposed over the end cap and the target retaining ring. Engagement of the end cap and the target retaining ring with the clamp causes the end cap to move within the target toward the stop to compress the sealing element between the target, the seal plate, and the beveled surface.
申请公布号 US2012146504(A1) 申请公布日期 2012.06.14
申请号 US201113309627 申请日期 2011.12.02
申请人 NEWCOMB RICHARD;ANGSTROM SCIENCES, INC. 发明人 NEWCOMB RICHARD
分类号 H01J25/50;F16J15/16 主分类号 H01J25/50
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