INDIUM ZINC OXIDE TRANSPARENT CONDUTIVE LAYER FOR AN ELECTRODE AND THE PREPARING METHOD THEREOF

摘要

PURPOSE: An IZO(Indium Zinc Oxide) transparent conductive film and a manufacturing method thereof are provided to obtain a thin film with enhanced etching properties and to obtain an amorphous or nano crystalline thin film at low temperatures. CONSTITUTION: An IZO transparent conductive film comprises indium oxide, zinc oxide, and titanium oxide. The IZO transparent conductive film is formed from an IZO sputtering target expressed as the following formula, InxZny(TiO2-a)z, where x+y<=1, 0.0001<=z<0.002, x:y=8.5-9.5:1.5-0.5, and 0.5<=a<=1.