FLAT-FIELD CORRECTION METHOD FOR TWO-DIMENSIONAL OPTICAL INSPECTION

摘要

PURPOSE: A flat field correction method of a two-dimensional optical measurement process is provided to correct unevenness of color and light intensity by calculating a light intensity value after correcting to an initial image of a standard LED unit. CONSTITUTION: A light intensity correction profile is calculated with flat field information. A light intensity correction rate corresponding to each image coordinate is acquired(S105). An image of a side region of a measurement light emitting body is recorded using a charge-coupled device(S106). A light intensity value is calculated after a correction process corresponding to each image coordinate in the image of the side region. A light intensity corrected measurement image is acquired(S107).