Absorption Cell and Manufacturing Method Thereof

摘要

An absorption cell includes a first absorption layer (110) formed of a first absorbent, and a second absorption layer (120) formed of a second absorbent having a higher density than the first absorbent and coated on the surface of the first absorption layer so as to prevent generation of dust particles from the first absorption layer. The upper surface of the first absorption layer is coated with the second absorption layer formed of the high-density absorbent, thereby preventing generation of minute dust particles and thus preventing secondary contamination.