发明名称 Graphene structure and method of fabricating the same
摘要 A graphene structure and a method of forming the same may include a graphene formed in a three-dimensional (3D) shape, e.g., a column shape, a stacking structure, and a three-dimensionally connected structure. The graphene structure can be formed by using Ge.
申请公布号 EP2463893(A2) 申请公布日期 2012.06.13
申请号 EP20110189558 申请日期 2011.11.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI, BYOUNG-LYONG;LEE, EUNK-YUNG;WHANG, DONG-MOK
分类号 H01L21/20;H01L21/02 主分类号 H01L21/20
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