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发明名称
摘要
申请公布号	JP4951872(B2)	申请公布日期	2012.06.13
申请号	JP20050111590	申请日期	2005.04.08
申请人		发明人
分类号	H01L29/78;H01L21/322;H01L21/336;H01L29/739	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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